Product > Mask Process > Defect Inspection
1. Repairing defects identified by the inspection tools.
2. Repair Equipment
Laser : DRS II 840-e
Ion Beam : ACCURA 800
3. Repair method
Milling : Instantaneous evaporation of defects using Laser
Deposition : Materials in the form of gas (Cr) are deposited and fixed at specific location on the pattern using Laser or Ion beam energy.
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