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Product > R&D > Patents |
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Untitled Document
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Application Area |
Method for correcting Line-width variation by stage tilt |
Section |
Registration
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IPC Classification |
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Patent Application Number |
2003-10266 |
Filing Date |
2003-02-19 |
Registration Number |
1020030010266 |
Announcement Date |
2005-08-31 |
Applicant |
PKL |
Registration Date |
2005-08-31 |
Inventor |
Park Eui Sang |
Application Area |
Method for correcting line-width variation by stage tilt and the non-uniformity of the surface of photomasks |
Section |
Registration
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IPC Classification |
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Patent Application Number |
2003-27425 |
Filing Date |
2003-04-30 |
Registration Number |
1020010085889 |
Announcement Date |
2005-06-14 |
Applicant |
PKL |
Registration Date |
2005-06-14 |
Inventor |
Choi Sang Soo / Jung Sung Mo / Kim Jin Min / Han Hee Cheol /
Park Eui Sang / Jeong Woo Gun / Park Dong Il |
Application Area |
ALCVD (Atomic layer Chemical Vapor deposition) Equipment |
Section |
Registration
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IPC Classification |
H01L21/20 |
Patent Application Number |
1020000048869
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Filing Date |
2000-08-23 |
Registration Number |
1003698590000
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Announcement Date |
2003-01-29 |
Applicant |
PKL |
Registration Date |
2003-01-15 |
Inventor |
S.H. Jeong et al. |
Application Area |
Dry Etcher |
Section |
Registration
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IPC Classification |
H01L21/3065 |
Patent Application Number |
1020000040529
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Filing Date |
2000-07-14 |
Registration Number |
1003589680000
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Announcement Date |
2002-10-30 |
Applicant |
PKL, Registration |
Date |
2002-10-17 |
Inventor |
Oh Kwang Sik / Jang Byung Soo / Kwon Hyuk Joo / Choi Boo Yeon / Park Kyung Ho / Jeong Soo Hong / Bae Nam Jin |
Application Area |
Process for metal mask manufacturing |
Section |
Registration
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IPC Classification |
G03F1/08 |
Patent Application Number |
1019990048336
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Filing Date |
1999-11-03 |
Registration Number |
1003585360000
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Announcement Date |
2002-10-25 |
Applicant |
PKL, Registration |
Date |
2002-10-15 |
Inventor |
Jang Byung Soo / Kwon Hyuk Joo / Choi Boo Yeon / Park Kyung Ho / Jeong Soo Hong |
Application Area |
Process Chamber design for ALCVD |
Section |
Registration
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IPC Classification |
H01L21/20 |
Patent Application Number |
1019990027045
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Filing Date |
1999-07-06 |
Registration Number |
1002955750000
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Announcement Date |
2001-07-12 |
Applicant |
PKL, Registration |
Date |
2001-05-02 |
Inventor |
Kwon Hyuk Joo / Jang Byung Soo / Hyun Kwang Soo / Park Kyung Ho / Jeong Soo Hong |
Application Area |
Multi-plate Thin film ALCVD Equipment |
Section |
Registration
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IPC Classification |
H01L21/203 |
Patent Application Number |
1019990015805
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Filing Date |
1999-05-01 |
Registration Number |
1003473790000
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Announcement Date |
2002-08-07 |
Applicant |
PKL, Registration |
Date |
2002-07-23 |
Inventor |
Hyun Kwang Soo / Park Kyung Ho / Yoon Neung Koo / Choi Kang Jun / Jeong Soo Hong |
Application Area |
ALCVD |
Section |
Registration
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IPC Classification |
H01L21/20 |
Patent Application Number |
1019990006286
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Filing Date |
1999-02-25 |
Registration Number |
1002832810000
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Announcement Date |
2001-02-15 |
Applicant |
PKL, Registration |
Date |
2000-12-06 |
Inventor |
Lee Hyung Jae / Kwon Hyuk Joo / Jang Byung Soo / Park Kyung Ho / Jeong Soo Hong |
Application Area |
Multi-plate Thin film ALCVD Equipment |
Section |
Registration
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IPC Classification |
H01L21/306 |
Patent Application Number |
1019990003366
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Filing Date |
1999-02-02 |
Registration Number |
1003031560000
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Announcement Date |
2001-09-26 |
Applicant |
PKL, Registration |
Date |
2001-07-09 |
Inventor |
Jang Byung Soo / Kwon Hyuk Joo / Lee Hyung Jae / Park Kyung Ho / Jeong Soo Hong |
Application Area |
Metal conducting wire manufacturing with barrier metal membrane |
Section |
Registration
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IPC Classification |
H01L21/28 |
Patent Application Number |
1019990003367
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Filing Date |
1999-02-02 |
Registration Number |
1002829270000
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Announcement Date |
2001-02-15 |
Applicant |
PKL, Registration |
Date |
2000-12-02 |
Inventor |
Lee Hyung Jae / Kwon Hyuk Joo / Jang Byung Soo / Park Kyung Ho / Jeong Soo Hong |
Application Area |
Elevator Mechanism for Dry Etcher |
Section |
Registration
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IPC Classification |
H01L21/306 |
Patent Application Number |
1019990003365
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Filing Date |
1999-02-02 |
Registration Number |
1003031550000
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Announcement Date |
2001-09-26 |
Applicant |
PKL, Registration |
Date |
2001-07-09 |
Inventor |
Jang Byung Soo / Kwon Hyuk Joo / Lee Hyung Jae / Park Kyung Ho / Jeong Soo Hong |
Application Area |
Bubbler Mechanism |
Section |
Registration
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IPC Classification |
L21/302 |
Patent Application Number |
1019970055144
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Filing Date |
1997-10-25 |
Registration Number |
1002534280000
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Announcement Date |
2000-06-01 |
Applicant |
PKL, Registration |
Date |
2000-01-24 |
Inventor |
Choi Boo Yeon / Park Yong Seok / Jeong Soo Hong |
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