제품소개 > IC Photomask  

* LOW Grade

4X/5X Reticle
Glass Size& Type Address Size CD Tolerance CD Uniformity Defect
Criteria		 Registration
5 X 5 X .090 Quartz 0.025~ ±0.08 0.08 0.4 ±0.08
6 X 6 X .120 Quartz 0.025~0.25 ±0.03 0.05 0.5 ±0.08
6 X 6 X .250 Quartz 0.02~0.25 ±0.02 0.04 0.2 ±0.035
4X Reticle
Glass Size& Type Address Size CD Tolerance CD Uniformity Defect Criteria Registration
6 X 6 X .250 Quartz 0.02~ ±0.03 0.035 0.2 ±0.1
1X Ultratech
Glass Size& Type Address Size CD Tolerance CD Uniformity Defect Criteria Registration
6 X 6 Quartz 0.02~ ±0.03 0.04 0.2 ±0.04
1X Mask
Glass Size& Type Address Size CD Tolerance CD Uniformity Defect Criteria Registration
5 X 5 X .090 Quartz 0.025~ ±0.1 0.1 0.7 ±0.08
6 X 6 X .090 Quartz 0.025~ ±0.1 0.1 0.7 ±0.08
7 X 7 X .150 Quartz 0.025~ ±0.15 0.2 1.0 ±0.1

 

* MIDDLE Grade

4X Reticle (BIM/PSM Masks)

Node

 Address Size CD Tolerance CD Uniformity Defect Criteria Registration

0.13㎛

0.00125

±0.02

0.025

0.15

±0.03

0.12㎛

0.00125

±0.015

0.02

0.12

±0.03

0.09/0.11㎛

0.00125

±0.015

0.015

0.1

±0.025

 

* HIGH Grade

4X Reticle (PSM Masks)

Node

 Address Size Mean to Target CD Uniformity Defect Criteria Registration

65㎛

0.0001

±0.007

0.006

0.1

±0.017

45㎛

0.0001

±0.005

0.004

0.1

±0.014

32㎛

0.0001

±0.004

0.003

0.05

±0.0095

 

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